Zirconium target material series
High purity zirconium targets and evaporation materials Zr+Hf≥99.98%
Chemical composition (ppm)
Element | Fe | Cr | Mo | Al | Ti | Mn | Ni | U |
Max(ppm) | 100 | 5 | 10 | 5 | 10 | 5 | 12 | 1 |
Element | Cu | Sn | Sb | W | Pb | Bi | Mg | P |
Max(ppm) | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 |
Element | Si | S | Nb | B | Cd | Be | Ca | Li |
Max(ppm) | 10 | 5 | 5 | 5 | 1 | 5 | 5 | 5 |
Element | Zn | Na | V | K | N | C | H | O |
Max(ppm) | 5 | 5 | 5 | 5 | 50 | 50 | 20 | 300 |
Element | Hf | |||||||
Max(ppm) | Hf≤0.03% or Hf≤3% |
Applications: semiconductor, electronics, medical, liquid crystal, photovoltaic and other coating areas
R60702 zirconium target
Chemical composition%
The element name | Zr+Hf | Hf(max) | Fe+Cr(max) | O | H(max) | N(max) | C(max) |
Percentage content | ≥99.2 | 4.5 | 0.2 | 0.16 | 0.005 | 0.025 | 0.05 |
Application: decoration, glass, function and other coating areas
Corrosion resistance of zirconium
1. The corrosion rate of industrial pure zirconium in all boiling concentrations of hydrochloric acid is less than 0.025mm/a.
Table 1 comparison of corrosion rates of zirconium and other metallic materials in 20% hydrochloric acid
material | The experimental time/h | Corrosion rate |
zirconium | 28 | 0.018 |
304 | 0.5 | >8890 |
316 | 0.5 | 1145 |
B-2 | 28 | 0.43 |
C-276 | 28 | 0.9 |
2. Zirconium has excellent corrosion resistance in sulfuric acid with a concentration of less than 70%.In addition, because stainless steel and nickel alloy can not be used in high temperature, 20% sulfuric acid and 40-60% of the boiling temperature of sulfuric acid range, zirconium in sulfuric acid environment has an irreplaceable role.
Table 2 comparison of corrosion rates between zirconium and stainless steel and nickel alloys
H₂SO₄Percent content | centigrade temperature | corrosion rate(mm/a) | ||||
Zr | 304 | 316 | B-2 | C-276 | ||
10 | 102 | 0.0025 | 52 | 14.2 | 0.025 | 0.018 |
30 | 108 | 0.0025 | >127 | >127 | 0.053 | 1.4 |
55 | 132 | 0.0025 | >104 | >104 | 0.048 | 7.5 |
55 | 168 | 0.5 | / | / | 0.94 | 54 |
2 | 225 | 0 | / | / | 0.38 | 1 |
5 | 232 | 0.0025 | / | / | 2.8 | 3.9 |
10 | 225 | 0.018 | / | / | 26 | 16.8 |
15 | 225 | 0.06 | / | / | / | / |
3.below 200℃, not more than 90% of nitric acid, zirconium has good corrosion resistance.
4.Zirconium is more resistant to corrosion in all concentrations, even boiling caustic solutions, than tantalum, niobium, and titanium
Crystallization of hafnium
Crystalline hafnium is a high purity hafnium produced by iodization
Purity Hf+Zr≥99.99%, diameter 20-40mm.The length can be cut according to customer’s request
Chemical composition | ||||||||
Element | Fe | Cr | Mo | Al | Ti | Mn | Ni | U |
Max(ppm) | 100 | 5 | 10 | 5 | 10 | 5 | 12 | 1 |
Element | Cu | Sn | Sb | W | Pb | Bi | Mg | P |
Max(ppm) | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 |
Element | Si | S | Nb | B | Cd | Be | Ca | Li |
Max(ppm) | 10 | 5 | 5 | 5 | 1 | 5 | 5 | 5 |
Element | Zn | Na | V | K | N | C | H | O |
Max(ppm) | 5 | 5 | 5 | 5 | 50 | 50 | 20 | 100 |
Element | Zr | |||||||
Max(ppm) | Zr≤0.2% or Zr≤0.3% or Zr≤0.5% |