| Item Name: high purity forged industrial titanium sputtering target 4N5 Purity: 99.99%~99.999% Shape: Square/Round, According to your request Size: Round: dia 25~300mm,Thickness:3~10mm; Rectangular: Length up to 1500mm Customization is available |
|
| Item Name | high purity forged industrial titanium target 99.999% |
| Purity | 99.99%~99.999% |
| Shape | Square/Round, According to your request |
| Round: dia 25~300mm,Thickness:3~10mm | |
| Size | Rectangular: Length up to 1500mm |
| Customization is available | |
| Certificates | ISO9001:2008, SGS, The third test report |
| Technics | Vacuum Melting, Patented thermo-mechanical process |
| Widely used in coating processing industries | |
| A: Solar Photovoltaic Application. | |
| Application | B: Electronic and Semiconductor Application. |
| C: Decoration and Coating Application. etc. | |
| Used | Coating |
| The following table is a component analysis certificate for 4N5 Ti sputtering target. The analytical methods used are: 1. Analysis of metal elements using GDMS or ICP-OES; 2. Gas element analysis using LECO. |
|||||||||||
| Elements | Actual | Spec | Units | Elements | Actual | Spec | Units | Elements | Actual | Spec | Units |
| Li | ˂0.005 | ppm | Zn | ˂0.02 | ppm | Pb | ˂0.01 | ppm | |||
| B | ˂0.01 | ppm | Ga | ˂0.05 | ppm | Bi | ˂0.01 | ppm | |||
| F | ˂0.05 | ppm | Ge | ˂0.05 | ppm | Y | ppm | ||||
| Na | ˂0.01 | ppm | As | ˂0.05 | ppm | Th | ˂0.0001 | ppm | |||
| Mg | ˂0.01 | ppm | Se | ˂0.05 | ppm | Er | ˂0.005 | ppm | |||
| Al | 0.78 | ppm | Zr | 0.08 | ppm | Ru | ˂0.01 | ppm | |||
| Si | 0.15 | ppm | Nb | ˂0.2 | ppm | Rh | ˂0.05 | ppm | |||
| P | 0.03 | ppm | Mo | ˂0.005 | ppm | Os | ˂0.01 | ppm | |||
| CI | ˂0.01 | ppm | Pd | ˂0.01 | ppm | Cs | ˂0.01 | ppm | |||
| K | ˂0.01 | ppm | Ag | ˂0.02 | ppm | Cd | ˂0.05 | ppm | |||
| Ca | ˂0.5 | ppm | Sn | 0.61 | ppm | ||||||
| Ti | Matnx | wt% | Sb | ˂0.05 | ppm | ||||||
| V | 0.62 | ppm | Ba | ˂0.005 | ppm | ||||||
| Cr | 5.4 | ppm | Hf | ˂0.01 | ppm | ||||||
| Mn | 0.93 | ppm | Ta | Source | ppm | C | ˂10 | ppm | |||
| Fe | 5.67 | ppm | W | ˂0.05 | ppm | S | 8.52 | ppm | |||
| Co | ˂0.01 | ppm | Pt | ˂0.05 | ppm | O | 250 | ppm | |||
| Ni | 0.06 | ppm | Au | ˂0.05 | ppm | N | 6.4 | ppm | |||
| Cu | 1.73 | ppm | Hg | ˂0.1 | ppm | H | ˂1 | ppm | |||